| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type pressure sensor having excellent response performance, a small measurement error, and a constitution capable of using a thin pressure-receiving film. SOLUTION: In this diaphragm type pressure sensor, the inside of a housing 1 is partitioned into the first chamber 31 and the second chamber 32 by the pressure receiving film 30, and a pressure transfer medium is filled in the first chamber 31, and a pressure sensor 9 capable of measuring a pressure of the pressure transfer medium is mounted in the first chamber 31, and a pressure of a measuring object fluid is supplied into the second chamber 32, and the pressure of the pressure transfer medium in the first chamber 31 changing by displacement of the pressure receiving film 30 is detected by the pressure sensor 9, to thereby measure the pressure of a measuring object fluid. In the sensor, the thickness of the pressure receiving film 30 is 0.2 mm or less, and each shape of an inner wall 31A of the first chamber 31 in the housing and an inner wall 32A of the second chamber 32 is formed approximately coincidently with a shape acquired when the pressure receiving film 30 is deformed maximumly, and a plurality of pores 33 are provided in the inner wall 31A of the first chamber linking to the pressure sensor 9. COPYRIGHT: (C)2009,JPO&INPIT
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