| 摘要 |
PROBLEM TO BE SOLVED: To provide a phase difference measuring device which measures with high accuracy a phase difference of an optical thin film formed on a spherical or aspherical surface other than a plane of an optical element, a phase difference measuring method using this device, and a manufacturing method of the optical element. SOLUTION: The phase difference measuring device has a polarizer through which the light from a light source is passed, a compensator into which the light coming from the polarizer and reflected by the optical thin film formed on the optical element is made to enter and which changes the phase of the light, an analyzer into which the light is made to enter, and a detector which receives the light from the analyzer, and the device measures the phase difference of the optical thin film. The device has a driving part which varies a distance between a detecting unit comprising the compensator, the polarizer and the detector and the optical thin film by driving the detecting unit, or has a diaphragm which varies a light reception range of the detector. COPYRIGHT: (C)2009,JPO&INPIT
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