ORGANIC LIGHT-EMITTING DIODE, METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, MANUFACTURING DEVICE FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE, AND PLASMA PROCESSING DEVICE

摘要

An organic layer is protected in the process of manufacturing an organic light-emitting diode. An organic layer (51) is continuously formed on ITO (50) on a substrate by deposition (step a in Fig. 2). A cathode layer (52) and a hydrogen-adsorbing layer (53) are formed by sputtering (step b and step c in Fig. 2), and part of the organic layer (51) is removed by etching (step d in Fig. 2). A side portion of the cathode layer (52) is formed by sputtering (step e in Fig. 2), the hydrogen-adsorbing layer (53) is formed by sputtering (step f in Fig. 2), and finally a sealing film (54) is formed by CVD (step g in Fig. 2). The hydrogen-adsorbing layer (53) adsorbs hydrogen gas used in the process of manufacturing the organic light-emitting diode. Thus, the organic layer (51) can be prevented from deteriorating.