| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface plate fixing structure capable of efficiently cooling, without increasing weight, without requiring a highly accurate temperature adjustment, without generating strain even if linear expansion coefficients of a surface plate and a base are different. SOLUTION: An attachment 14 is used for fixing the surface plate 12 for movably supporting a stage 11 to the base 13. The attachment 14 is positioned in three places at an equal angle interval with the center as the rotational center at an equal distance from the center of a fixing surface 12a of the surface plate 12, and the surface plate 12 is fixed to the base 13 via the attachment 14. The respective attachments 14 are formed lower than rigidity of the surface plate 12 in rigidity in the direction along a straight line of connecting its positioned and the center of the fixing surface 12a of the surface plate 12, and when the temperature rises, even if a difference is caused in the linear expansion between the surface plate 12 and the base 13, its difference is absorbed by the attachment 14. The surface plate 12 and the base 13 are connected in a central position of the fixing surface 12a, and a support 41 is arranged for absorbing relative swinging in the X axis, Y axis directions of the fixing surface between both, and positional dislocation of the center of the fixing surface by a lateral load is eliminated. COPYRIGHT: (C)2009,JPO&INPIT |
