| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor device capable of eliminating effect of gravity acceleration, inhibiting the use of circumference elements, such as reference capacitative elements and the like, and miniaturizing itself due to simple configuration at the occasion of detection of acceleration. <P>SOLUTION: The acceleration sensor device is equipped with an insulating substrate 32 including a Z-axis fixed electrode Zs1 formed symmetrically about X-axis, an X-axis fixed electrode Xs1 formed at one side of the Z-axis fixed electrode Zs1 with an X-axis direction relative to the origin of X- and Y-axis, and a Y-axis fixed electrode Ys1 formed at one side of a Z-axis fixed electrode Zs1 with an Y-axis direction relative to the origin of X- and Y-axis. The acceleration sensor device is formed to be integrated with a weight W1 with a gravity center on Z-axis and is equipped with a displacement member 14a on which an X-axis electrode plate Xm1, a Y-axis electrode plate Ym1, and a Z-axis electrode section Zm1 are all prepared. The acceleration sensor device supports the displacement member 14a within a case 14c and is equipped with a plurality of elastic deformable beam members 14b. The acceleration sensor device is equipped with a pair of sensor modules SM1 and SM2 equipped with capacitative elements Cx1, Cx2, Cy1, Cy2, Cz1 and Cz2 for each electrode at front-back both sides rotational-symmetrically. <P>COPYRIGHT: (C)2009,JPO&INPIT |
