VIBRATING GYROSCOPE USING PIEZOELECTRIC FILM AND METHOD FOR MANUFACTURING SAME

摘要

A vibrating gyroscope comprises a ring-shaped vibrating body (11) having a uniform plane, a leg portion (15) flexibly supporting the ring-shaped vibrating body (11) and having a fixed end, and a plurality of electrodes (13a-13d) and a fixed potential electrode (16) each formed on the plane with a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction thereof. When N is a natural number of 2 or more, the plurality of electrodes (13a-13d) include driving electrodes (13a) for exciting a primary vibration of the vibrating body (11) in a vibration mode of cosN?, which are each disposed (360/N)° apart from each other in a circumferential direction, first detection electrodes (13b) for detecting a secondary vibration generated when an angular velocity is applied to the vibrating body (11), which are each disposed (90/N)° apart clockwise or counterclockwise from the driving electrode (13a), and second detection electrodes (13d) for detecting the secondary vibration, which are each disposed (180/N)° apart from the first detection electrode (13b). Each of the electrodes (13a) is disposed in a region from the outer peripheral edge of the vibrating body (11) to the vicinity of the outer peripheral edge and/or a region from the inner peripheral edge thereof to the vicinity of the inner peripheral edge.