发明名称 SUBSTRATE CARRYING DEVICE AND SYSTEM EQUIPPED WITH DUSTPROOF MECHANISM AND SEMICONDUCTOR MANUFACTURING DEVICE USING THE DEVICE AND SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a dustproof mechanism having high dustproof effects and capable of responding to a plurality of arm parts. SOLUTION: The dustproof mechanism is provided with a support member 4 supporting the arm parts mounted with a substrate, connected to a guide mechanism 22 provided within a support column 9 via a linear opening part provided on the outer face of the support column 9, and moving an opening of the opening part following the guide mechanism 22, and with a seal belt 5b for sealing the opening part to isolate inside of the support column 9 from outside. Even when the support member 4 is moved by the guide mechanism 22, the seal belt 5b prevents inside of the support column 9 from being exposed to outside. Both ends of the seal belt 5b are fixed to inside of the support column 9, and the seat belt 5b is wound around rollers 35-42 rotatably supported by the support member 4 and installed to seal the opening part. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009173444(A) 申请公布日期 2009.08.06
申请号 JP20080297260 申请日期 2008.11.20
申请人 YASKAWA ELECTRIC CORP 发明人 TANAKA KENTARO;SUEYOSHI SATOSHI
分类号 B65G49/07;B25J19/00;B65G49/06;H01L21/677 主分类号 B65G49/07
代理机构 代理人
主权项
地址