| 摘要 |
A twin-shaped coating device having strengthened separation plate is provided to permit effective coating processes automatically, and to offer high evaporation accuracy efficiently. A twin-shaped coating device having strengthened separation plate coats a substrate. The twin-shaped coating device includes the followings: at least two process chambers(1-4) which are adjacently arranged; a separation plate(9) between the process chambers; and a pumping unit(12,13) exhausting the process chamber. The separation plate includes a conduit having at least two end parts. One end part of the conduit is connected with the pumping unit. And the other end part has at least one suction opening for the process chamber. The separation plate is strengthened by the conduit.
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