SURFACE-TEXTURED ZINC OXIDE BASED TRANSPARENT CONDUCTIVE THIN FILM HAVING DOUBLE LAYER STRUCTURE AND METHOD FOR PREPARTING THE SAME

摘要

A surface-textured zinc oxide based transparent conductive thin film having double-layered structure and a method for manufacturing the same are provided to lower the resistivity by texturing the surface through the sputtering which uses the mixing gas of inert gas and steam. The first layer transparent conductive thin film(1) is laminated on a base material(3). The second level zinc oxide transparent conductive thin film(2) is laminated on the first layer transparent conductive thin film by the sputtering. The resistivity of the first layer thin film is lower than that of the second layer thin film. The second layer thin film is laminated by the sputtering using the process gas containing steam and inert gas. The inert gas is the argon(Ar).