Piezoelectric/electrostrictive film element and method manufacturing the same

摘要

An actuator (10) includes a fired ceramic substrate (12) having a space (14) opened downward, a first electrode (22) formed on the upper surface of the fired ceramic substrate above the space, a piezoelectric/electrostrictive body (30) formed on the first electrode so that the volume changes with input and output of electric power, and a second electrode (24) formed on the piezoelectric/electrostrictive body. The piezoelectric/electrostrictive body is composed of Pb(Zr 1-x Ti x )O 3 or (Li, Na, K) (Nb, Ta)O 3 as a main component and contains crystals (32) oriented along the direction of an electric field. In the actuator, the degree of orientation of the piezoelectric/electrostrictive body can be increased regardless of the orientation of the substrate on which the piezoelectric/electrostrictive body is formed.