| 摘要 |
Provided in this invention is a low-cost substrate provided with a transparent conductive film for photoelectric conversion device, which can improve performance of the photoelectric conversion device by enhanced light confinement effect achieved with effectively increased surface unevenness of the substrate. A method for manufacturing said substrate and a photoelectric conversion device using said substrate which can show improved performance are also provided. The substrate provided with the transparent conductive film for the photoelectric conversion device comprises a transparent insulating substrate and a transparent electrode layer containing at least zinc oxide deposited on the transparent insulating substrate, wherein the transparent electrode layer is composed of a double layer structure wherein first and second transparent conductive films are deposited in this order from a substrate side. The transparent conductive film has an average film thickness of 10-500nm, and the second transparent conductive film has an average film thickness of 300-1,500nm. The average film thickness of the second transparent conductive film is larger than that of the first transparent conductive film, and an average height difference of the unevenness on the surface of the second transparent conductive film is 10-300nm, which is larger than that of the first transparent conductive film. |
