INTEGRATED MONOLITHIC INTERFERENCE DETECTION DEVICE

摘要

The device (20) has an amplitude network (2) e.g. bidimensional metallic amplitude network, for generating field of interference between two light beams. A silicon photodiode (5) receive the interference field. The amplitude network is integrated to the photodiode using complementary MOS technology. A voltage generator (9) is connected between upper and lower metallic contacts (3, 6) for generating potential difference in the photodiode. The amplitude network comprises a succession of opaque zones and transparent zones that are transparent to incident beams. An independent claim is also included for a method for fabricating a phase difference detecting device.