MANUFACTURING METHOD OF THIN FILM FOR DIFFUSION BARRIER AND THIN FILM FOR DIFFUSION BARRIER PRODUCED THEREBY

摘要

A diffusion barrier manufacturing method and a diffusion barrier manufactured by the same are provided to control impurity content and fine structure in order to prevent diffusion by controlling initial pressure of a chamber before evaporation. A diffusion barrier manufacturing method comprises following steps. The content of impurity inside a diffusion barrier is controlled by controlling initial pressure inside a chamber, so the fine structure of the diffusion barrier is controlled. The initial pressure is maintained in 1 x10-5torr ~ 5 x 10-5torr within the chamber. The diffusion barrier is made of the transition metal. The transition metal is Mo. The impurity is the oxygen, the nitrogen or the carbon.