Probe straightness measuring method

摘要

A probe straightness measuring method includes: placing a measurement jig (71) having a measurement reference surface (72) with a known profile error on a stage surface (2A) of an XY stage (2) so that the measurement reference surface (72) is slanted in a moving direction of the XY stage (2); measuring a displaced position of the measurement piece by a displacement detector of the probe each time the XY stage is moved for a predetermined distance while controlling a driving actuator so that the measurement piece (14) of a probe touches the measurement reference surface at a constant pressure; and calculating a straightness error of a measurement-piece moving mechanism on a basis of a measured position (Zreal) of the measurement piece obtained in the measuring, a nominal position (Znom) of the measurement piece obtained by a calculation and a slant angle (¸) of the measurement reference surface.