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发明名称
Method of manufacturing a phase change memory device having a uniform heater height
摘要
申请公布号
EP1764837(B1)
申请公布日期
2009.08.05
申请号
EP20050108414
申请日期
2005.09.14
申请人
STMICROELECTRONICS S.R.L.
发明人
KARPOV, ILYA;KIM, YUDONG;JIN, MING;TEEGAPURAM, SHYAM PRASAD;LEE, JINWOOK
分类号
H01L27/24;H01L45/00
主分类号
H01L27/24
代理机构
代理人
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