Apparatus and method for calibrating a reflecting mirror

摘要

An apparatus for measuring the position of the mirror of a diffractive light modulator and performing positional compensation, and a method of controlling the apparatus. A position measurement unit measures the position of a mirror of the diffractive light modulator. A control unit calculates the value of displacement from a reference position by evaluating a position value calculated by the position measurement unit, calculates a compensation value and outputs a compensation control signal. A compensation and actuation unit performs compensation on a drive voltage in response to the compensation control signal, and actuates the mirror of the diffractive light modulator using the compensated drive voltage.