发明名称 |
Forming closely spaced electrodes |
摘要 |
The present invention provides an apparatus and a method of fabricating the apparatus. The apparatus comprises a substrate having a planar surface and first and second electrodes located on the planar surface. The first electrode has a top surface and a lateral surface, and the lateral surface has an edge near or in contact with the substrate. An electrode insulating layer is located on the top surface and a self-assembled layer located on the lateral surface. The second electrode is in contact with both the self-assembled layer and the electrode insulating layer.
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申请公布号 |
US7569416(B2) |
申请公布日期 |
2009.08.04 |
申请号 |
US20060424655 |
申请日期 |
2006.06.16 |
申请人 |
ALCATEL-LUCENT USA INC.;OFFICE OF TECHNOLOGY LICENSING & INTL PROPERTY |
发明人 |
BAO ZHENAN;ZHENG JIE;STURM JAMES C.;GRAVES-ABE TROY |
分类号 |
H01L21/00;H01L51/40 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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