| 摘要 |
An inspection system is provided to shorten the test time by performing consolidation of a plurality of defect coordinates of the substrate to one coordinate. The inspection system comprises the apparatus for inspecting defect and review inspection apparatus. The apparatus for inspecting defect recognizes the defect(503) formed in the substrate. The apparatus for inspecting defect comprises the defect size and the defect position coordination. According to defect position coordination, the apparatus for inspecting defect, inspects the image pickup coverage by the microscope(501). The review inspection apparatus comprises the coordinate output unit which produces coordinate according to the image pickup coverage information to reduce the number of moving. The coordinate output unit comprises the review inspection apparatus and the different apparatus.
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