发明名称 Electron beam system and method of operating the same
摘要 An electron beam system (such as a scanning electron microscope or an electron probe microanalyzer) capable of displaying backscattered electron (BSE) images at the same brightness and same contrast at all times if the atomic number differences are the same when illumination conditions including accelerating voltage and emission current are varied or when the specimens are imaged with different instruments.
申请公布号 US7569819(B2) 申请公布日期 2009.08.04
申请号 US20070873639 申请日期 2007.10.17
申请人 JEOL LTD. 发明人 MORI NORIHISA
分类号 H01J37/26 主分类号 H01J37/26
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