3-D MEASURING METHOD BY USING MULTI WAVELENGTH REFERENCE PHASE

摘要

A 3D measurement method applying the multi-wavelength phase is provided to measure the phase although it is not between the cycles of a grating pattern. A 3D measurement method applying the multi-wavelength phase is as follows. A grating pattern having the short wavelength in order to save the broadband measurement phase of a measurement object is projected to in the measurement object. The image of the grating pattern projected at the measurement object is obtained. The grating pattern having long wavelength is projected to the measurement object. The image of the grating pattern having the long wavelength projected in the measurement object is obtained. The grating pattern having the short wavelength is moved in order to be projected to the measurement object. The grating pattern image of the short wave length is obtained. The grating pattern having long wavelength is moved and it is projected to the measurement object. The grating pattern image of the long wavelength is obtained. The measurement phase of the short wavelength is obtained as the image of the grating pattern of the short wavelength. The measurement phase of the long wavelength is obtained as the image of the grating pattern of the long wavelength.