| 摘要 |
The method for measuring the porosity of an element is performed by means of a measuring device comprising a measuring chamber in which the element is disposed, a solvent tank associated with an adsorption valve, and a pump associated with a desorption valve. The measuring method comprises measurement of the pressure in the chamber by means of a pressure sensor, and a cycle for measuring the porosity by ellipsometry at different predetermined pressure. During this measuring cycle, a pressure controller controls opening of the adsorption and desorption valves according to the measured pressure. The relative pressure in the chamber is successively regulated at different predetermined values, while maintaining a continuous flow of solvent in the chamber between the tank and the pump.
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