发明名称 Semiconductor device and manufacture method thereof
摘要 An object is to provide an element structure of a semiconductor device for increasing an etching margin for various etching steps and a method for manufacturing the semiconductor device having the element structure. An island-shaped semiconductor layer is provided over an insulator having openings. The island-shaped semiconductor layer includes embedded semiconductor layers and a thin film semiconductor layer. The embedded semiconductor layers have a larger thickness than that of the thin film semiconductor layer.
申请公布号 US7569886(B2) 申请公布日期 2009.08.04
申请号 US20080031881 申请日期 2008.02.15
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 MATSUKURA HIDEKI
分类号 H01L27/01 主分类号 H01L27/01
代理机构 代理人
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