| 摘要 |
In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen. The light source is disposed at an entrance pupil position on the projection optical system side or at a position conjugate to the entrance pupil position and moves in an entrance pupil plane or in a plane conjugate to the entrance pupil position, along a straight line orthogonal to the optical axis, while a distance from the optical axis is detected. The light detector is disposed at an exit pupil position on the photometric optical system side or at a position conjugate to the exit pupil position. The optical-measurement apparatus comprises a light-source changing unit configured to change the position or shape of the light source.
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