APPARATUS AND METHOD FOR IMPRINTING A FINE PATTERN

摘要

An apparatus and method for imprinting a fine pattern are provided to enhance the work efficiency of the imprint process by performing an imprint between a stamp and a substrate. The lower chamber(200) supports the substrate(P) in which the photo-crosslinkable polymer resin(R) is coated. The lower chamber transport unit(300) transfers the lower chamber. The upper chamber(400) is ascended and descended in order to form the enclosure in contact with the transferred lower chamber. At this time, the upper chuck(410) supports the stamp(S) in which micro-pattern is imprinted. The dispenser is coated with the photo-crosslinkable polymer resin. The ultra-violet ray lamp irradiates the ultraviolet ray in the photo-crosslinkable polymer resin.