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发明名称
METHOD AND APPARATUS FOR PRODUCING UNIFORM PROCESSING RATES
摘要
申请公布号
IL166342(A)
申请公布日期
2009.08.03
申请号
IL20050166342
申请日期
2005.01.17
申请人
LAM RESEARCH CORPORATION;ARTHUR M. HOWALD;ANDREAS KUTHI;MARK HENRY WILCOXSON;ANDREW D. BAILEY, III
发明人
ARTHUR M. HOWALD;ANDREAS KUTHI;MARK HENRY WILCOXSON;ANDREW D. BAILEY, III
分类号
H05H1/46;H01J37/32;H01L21/3065;H01Q1/26;H01Q7/00;H01Q11/12;H01Q21/29
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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