MICROCALORIMETER DEVICE WITH ENHANCED ACCURACY

摘要

A micro calorimeter device with enhanced accuracy is provided to measure the minute heat capacity of 10-6J/K accurately to material having various micrometer and nano sizes within temperature range of 20K~800K. A micro calorimeter device with enhanced accuracy comprises a first silicon nitride thin film(12a,12b), second silicon nitride thin film(13), heater/sensor(14a,14b), and an isothermal layer(15). The first silicon nitride thin film is equipped at the upper side of a duplex-grinded silicon frame(11a,11b). The second silicon nitride thin film is equipped at the lower-part. The heater/sensor is connected to an electricity leader line on the lower surface of the second silicon nitride thin film.