VAPOR DETECTING METHOD AND VAPOR DETECTING DEVICE

摘要

FOR DETECTING A COMPONENT OF A SUBSTANCE (OF LIQUID OR SOLID) ON A FRONT SURFACE OF A SUBSTRATE, THE SUBSTRATE WITH THE SUBSTANCE THEREON IS TRANSFERRED INTO A VAPORIZING SECTION (3), THE SUBSTANCE IS HEATED IN THE VAPORIZING SECTION (3) SO THAT THE COMPONENT IS VAPORIZED FROM THE SUBSTANCE IN THE VAPORIZING SECTION (3), THE COMPONENT VAPORIZED IS FED FROM THE SUBSTANCE IN THE VAPORIZING SECTION (3) TO A DETECTING SECTION (4), AND THE VAPORIZED COMPONENT IS DETECTED IN THE DETECTING SECTION (4).