| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve functional certainty of a conventional technology, in a mechanical device for installing and/or removing a laser nozzle. <P>SOLUTION: A stain collector 13 for storing a generated pollution particle and a positioning device 15 for the stain collector 13, are additionally arranged in addition to a nozzle storage space 12. The stain collector 13 can move to a function preparing position 18 instead of the nozzle storage space 12 by the positioning device 15 arranged for the stain collector 13, and the stain collector 13 can also move to a position separate from the function preparing position 18 by the positioning device 15 arranged for the stain collector 13. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
