| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate processing apparatus attaining change of installing and processing orders without much labor and time, and to provide an organic electroluminescent device. SOLUTION: The substrate processing apparatus 11 manufacturing the organic electroluminescent device includes a plurality of fixed chambers 15a-15f adjusted to have atmospheres different from the air, and a substrate conveying chamber 14 conveying a substrate 1 to be processed to the plurality of fixed chambers 15a-15f. In the substrate conveying chamber 14, a conveying chamber 23 moves along a protruded conveying guide 25 to send and receive the substrate to and from the fixed chambers 15. The inside of the conveying chamber 23 is set to have a vacuum or nitrogen atmosphere when it sends and receives the substrates to and from the fixed chambers 15c-15f set in a nitrogen atmosphere. COPYRIGHT: (C)2009,JPO&INPIT
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