| 摘要 |
PROBLEM TO BE SOLVED: To provide a small processor having a simple and stable carrying mechanism good in carrying accuracy. SOLUTION: The processor comprises a processing basket 30 for carrying and processing electronic devices and their substrates, a plurality of processing tanks 20-1 to 3 for processing the electronic devices and their substrates, vertically moving parts 40-1 to 5 arranged over an input part in which the processing basket 30 is set, the plurality of processing tanks 20-1 to 3 and an output part out of which the processing basket 30 is picked, for moving the processing basket 30 in the vertical direction, a holding part 50 for holding the processing basket 30 and moving it in the horizontal direction, and a horizontally moving part 60 for moving the processing basket 30 held by the holding part 50 in the horizontal direction. COPYRIGHT: (C)2009,JPO&INPIT
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