METHOD FOR MANUFACTURING ELASTIC WAVE ELEMENT

摘要

Disclosed is a method for manufacturing an elastic wave element, which has excellent temperature coefficient of frequency (TCF), high machining accuracy of an IDT pattern and is durable to high-temperature process at 200°C or higher. The method is provided with a step of forming an IDT (2) on one main surface (1a) of a piezoelectric substrate (1), and a step of forming a film by thermally spraying a material (3) having a linear expansion coefficient smaller than that of the piezoelectric substrate, on the other main surface (1b) of the piezoelectric substrate (1) whereupon the IDT (2) is formed.