Capacitive transducer for use as actuator or sensor in e.g. micromechanical component, has plate electrodes arranged in plane that is parallel to another plane such that electrodes overlap each other during tilting of one of plates

摘要

The transducer has a set of plate electrodes (102, 304) arranged on a diaphragm (100) in a plane along one of edges (104) of the electrodes. Another set of plate electrodes (106) is arranged in another plane that is parallel to the former plane such that the plate electrodes (102, 106) overlap each other during tilting of the electrode plate (102), where an overlapping surface of the plate electrodes is changed. The former plane cuts the diaphragm at a right angle. The diaphragm exerts a flexible resetting force on the plate electrodes (102, 304), where the force acts against tilting. An independent claim is also included for a method for producing a capacitive transducer.