| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a metal capacitor sharply improved in electric conductivity and its manufacturing method. <P>SOLUTION: The metal capacitor includes a metal member with many grooves formed on one surface thereof; a metal oxide film 12 formed on the metal member; an insulating film 14 formed on the metal oxide film so that the many grooves are exposed; and an embedding electrode member 13 formed on the metal oxide film so that the many grooves are embedded. The manufacturing method of the metal capacitor includes an etching process where many grooves are arranged and formed on one surface of the metal member by one of DC etching, AC etching, and wet etching after masking one side surface of the metal member; a forming process of forming the metal oxide film on the groove formation surface of the metal member by an anodic method; a process of forming an insulating film on the metal oxide film by a CVD method; a process of forming an embedding electrode member so that the many grooves formed at the metal member are embedded; and an electrode formation process where many first external electrode 21 are coupled with the metal member and the embedded electrode member. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
