COPPER THIN FILM WITH SUPERIOR ADHESIVENESS, AND WIRING AND ELECTRODE FOR LIQUID CRYSTAL DISPLAY COMPRISING THE COPPER THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a copper thin film for forming wiring and an electrode for a liquid crystal display. SOLUTION: The copper thin film with superior adhesiveness has a component composition containing fluorine of 0.01-5 at.%, and a remainder comprising Cu and unavoidable impurities. The wiring for the liquid crystal display includes the copper thin film, and the electrode for the liquid crystal display with superior adhesiveness includes the copper thin film. COPYRIGHT: (C)2009,JPO&INPIT