| 摘要 |
PROBLEM TO BE SOLVED: To greatly improve the processing performance by accelerating the speed of correction control. SOLUTION: A carrying device 26 transfers a semiconductor device 12 and makes a terminal 14 of the semiconductor device 12 contact a test contact point 16 of a socket 18. A first lighting unit 44 illuminates the terminal 14 of the semiconductor device 12. A second lighting unit 52 illuminates the test contact point 16 of the socket 18. A luminance selecting unit 60 selects the luminance of each illumination. A correction-computing unit 72 acquires correction data 70 on the attitude, in which the carrying device 26 supports the semiconductor device 12, by comparing an image 68 to be corrected with a reference image data 64. The attitude in which the carrying device 26 supports the semiconductor device 12 is corrected and controlled by acquiring a composite image 62 and the correction data 70, without having to stop the transfer operation. COPYRIGHT: (C)2009,JPO&INPIT
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