| 摘要 |
PROBLEM TO BE SOLVED: To provide a thick, hard film-coated member having high hardness and excellent wear resistance while maintaining high adhesion under the suitable control of residual compressive stress. SOLUTION: This invention relates to the hard film-coated member, which is characterized in that a hard film is expressed by (Me1-aXa)α(N1-x-yCxOy); wherein, Me denotes one or more elements selected from the group 4a, 5a and 6a elements in the periodic table, X denotes one or more elements selected from Al, Si, B and S, and 10≤a≤65, 0≤x≤10, 0≤y≤10 and 0.85≤α≤1.25 are satisfied. The hard film has a face-centered cubic structure, in the X-ray diffraction of the hard film, 0.2≤(200)/(111)≤1.2 and 0.2≤(220)/(200)≤1.0 are satisfied, and when the half-value width of the (111) plane is denoted as W (degree), W≤0.7 is satisfied, and when the film thickness of the hard film is denoted as T (μm), 5≤T≤30 is satisfied. COPYRIGHT: (C)2009,JPO&INPIT
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