| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of a liquid injecting head, the manufacturing cost of which can be reduced. SOLUTION: The manufacturing method of this liquid injecting head 100 includes a process for forming a sacrificial layer 184 above a board 180, a process for forming a piezoelectric body layer 142 above the sacrificial layer, a process for forming a first electrode 140 above the piezoelectric body layer, a process for forming an elastic layer 108 above the first electrode, a process for forming a flow passage forming layer 105 having an opening part for forming a pressure chamber 124 and a flow passage sidewall 106 serving as the sidewall of the pressure chamber, a precess for forming the pressure chamber by forming a nozzle plate 102 having a nozzle hole 126 thereon above the flow passage forming layer, a process for peeling off the board by removing the sacrificial layer and a process for forming a second electrode below the piezoelectric body layer and, in addition, wherein the flow passage sidewall is made of photosensitive resin. COPYRIGHT: (C)2009,JPO&INPIT
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