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发明名称
摘要
申请公布号	JP2009527900(A)	申请公布日期	2009.07.30
申请号	JP20080555428	申请日期	2007.01.05
申请人		发明人
分类号	H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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