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发明名称
ANTIREFLEKTIERENDE BESCHICHTUNGEN FÜR FOTORESISTZUSAMMENSETZUNGEN UND VERWENDUNG DERSELBEN
摘要
申请公布号
DE69840910(D1)
申请公布日期
2009.07.30
申请号
DE19986040910
申请日期
1998.04.21
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
DING, SHUJI;LU, PING-HUNG;KHANNA, DINESH N.;SHAN, JIANHUI;DURHAM, DANA L.;DAMMEL, RALPH R.;RAHMAN, DALIL M.
分类号
G03F7/09;G03F7/11;C08F8/30;C08F212/14;C08L25/18;C09B69/10;H01L21/027
主分类号
G03F7/09
代理机构
代理人
主权项
地址
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