| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion gun and a film-forming device capable of improving speed-up of a process by making it possible to obtain higher current density. SOLUTION: This ion gun 1 is equipped with a negative electrode 2 in which a slit-shaped opening part 11 is formed, a magnet 3 to generate a magnetic field in the width direction of the opening part 11, a positive electrode 4 separately arranged from the rear face of the negative electrode 2 so as to generate an electric field in the nearly perpendicular direction to this magnetic field. The ion beam B is extracted from the opening part 11 of the surface of the negative electrode 2, and a material to constitute the positive electrode 4 is a ferromagnetic material or a weak magnetic material in which non-magnetic stainless steel is made into the weak magnetic material by heat-treatment. COPYRIGHT: (C)2009,JPO&INPIT
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