| 摘要 |
PROBLEM TO BE SOLVED: To measure a high S/N ratio and high space resolution elastic scattering electron image, an element image formed with characteristic X-rays and an element image formed by an electron beam energy spectrum in an electron microscope device having an element image generating function. SOLUTION: A characteristic X-ray signal and an electron beam energy loss spectrum are measured or a plurality of energy filter signals including core losses of an observed element are measured simultaneously and continuously with detection of elastic scattering electrons transmitted through an analyzing sample object to integrate the element images formed with the characteristic X-rays and the electron beam energy spectrum while correcting positional displacement based on the continuously observed elastic scattering electron images. COPYRIGHT: (C)2009,JPO&INPIT
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