发明名称 |
Method for manufacturing magnetic recording medium and connecting device used in manufacturing magnetic recording medium |
摘要 |
In a method for manufacturing a magnetic recording medium, a plurality of vacuum film-formation devices formed separately and operated independently is prepared. The plurality of vacuum film-formation devices is connected by a connecting device provided with a disk transport system.
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申请公布号 |
US2009191332(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
US20090320086 |
申请日期 |
2009.01.16 |
申请人 |
FUJI ELECTIRC DEVICE TECHNOLOGY CO., LTD. |
发明人 |
TAKAYA SHIGEAKI |
分类号 |
B05D5/12;H01L21/677 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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