发明名称 Method for manufacturing magnetic recording medium and connecting device used in manufacturing magnetic recording medium
摘要 In a method for manufacturing a magnetic recording medium, a plurality of vacuum film-formation devices formed separately and operated independently is prepared. The plurality of vacuum film-formation devices is connected by a connecting device provided with a disk transport system.
申请公布号 US2009191332(A1) 申请公布日期 2009.07.30
申请号 US20090320086 申请日期 2009.01.16
申请人 FUJI ELECTIRC DEVICE TECHNOLOGY CO., LTD. 发明人 TAKAYA SHIGEAKI
分类号 B05D5/12;H01L21/677 主分类号 B05D5/12
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