| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly accurately recognize the images of components stably over a long period. <P>SOLUTION: A linear motor 73 for driving a scan unit 71 has a mover comprising permanent magnets 732, and a mover comprising coil portions 733. The linear motor 73 has a configuration in which the permanent magnets 732 are disposed over a range larger than the range of movement of the coil portions 733 corresponding to the range of movement of the scan unit 71, so that a magnetic flux can be formed between each coil portion 733 and each permanent magnets 732, compared advantageously with the other positions, even at both end positions of the range of movement of the scan unit 71. <P>COPYRIGHT: (C)2009,JPO&INPIT |
