| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron scanning microscope equipped with a function for making an object point 33 at a prescribed position even in an electro-optical condition in which precise control of an object point position of an objective lens 11 becomes difficult. SOLUTION: By installing a deflector for an object point detection different from one for the electron beam scanning at a position where the object point of the objective lens 11 is desired to be made, the electron scanning microscope is equipped with a function of automatic correction so that the object point is positioned at the position of the deflector for object point detection by utilizing characteristics that image movement by the deflector becomes minimum when the object point exists at the position of the deflector. COPYRIGHT: (C)2009,JPO&INPIT
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