| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system capable of considerably suppressing occurrence of interference fringes, and a device and a method for inspecting patterns therefor, and a method for manufacturing an article with patterns therefor. SOLUTION: The optical system includes an integrator unit for splitting incident light into a plurality of beams; a first driving unit for rotating the integrator unit around an optical axis; a rotational phase plate located on the exit side of the integrator unit, having a plurality of recesses with optical path lengths different each other; and a second driving unit for rotating the rotational phase plate. COPYRIGHT: (C)2009,JPO&INPIT
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