发明名称 PIEZOELECTRIC DRIVING DEVICE, PIEZOELECTRIC DRIVING CONTROL METHOD, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric driving device and a piezoelectric driving control method, that can control a displacement amount of a piezoelectric actuator with good linearity, and to provide an electronic device using the piezoelectric driving device. SOLUTION: Provided is the piezoelectric driving device including a base body which can be deformed by being applied with force, a first piezoelectric body formed on a first surface of the base body directly or with another layer interposed, a second piezoelectric body formed on a second surface of the base body which is parallel to the first surface directly or with another layer interposed, a drive voltage generation unit which generates a drive voltage corresponding to the displacement amount of the stack having the second piezoelectric body and base body, a compensation voltage generation unit which generates a compensation voltage for compensating for hysteresis generated when the stack is displaced with the drive voltage, and a voltage application unit which applies the drive voltage and compensation voltage to the first piezoelectric body and second piezoelectric body, respectively. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009170677(A) 申请公布日期 2009.07.30
申请号 JP20080007449 申请日期 2008.01.16
申请人 ADVANTEST CORP 发明人 HORI HISAO;WATABE TAKASHI
分类号 H01L41/09;H01G5/18;H01L41/187 主分类号 H01L41/09
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