发明名称 |
THIN FILM TRANSISTOR, METHOD OF FABRICATING THE SAME, AND ORGANIC LIGHT EMITTING DIODE DISPLAY DEVICE HAVING THE TFT |
摘要 |
A thin film transistor (TFT), a method of fabricating the same, and an organic light emitting diode (OLED) display device having the TFT, the TFT including a substrate, a gate electrode disposed on the substrate, a gate insulating layer disposed on the gate electrode, a semiconductor layer disposed on the gate insulating layer and crystallized using a metal catalyst, and source and drain electrodes disposed on the semiconductor layer and electrically connected to source and drain regions of the semiconductor layer. A second metal is diffused into a surface region of the semiconductor layer, to getter the metal catalyst from a channel region of the semiconductor layer. The second metal can have a lower diffusion coefficient in silicon than the metal catalyst.
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申请公布号 |
US2009189160(A1) |
申请公布日期 |
2009.07.30 |
申请号 |
US20090357513 |
申请日期 |
2009.01.22 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
AHN JI-SU;PARK BYOUNG-KEON;YANG TAE-HOON;SEO JIN-WOOK;LEE KIL-WON;LEE KI-YONG;KIM SUNG-CHUL |
分类号 |
H01J1/62;H01L21/20;H01L21/336;H01L21/84;H01L29/786 |
主分类号 |
H01J1/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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