An apparatus includes a substrate and a mirror. The mirror is attached to the substrate via a spring. An electro-mechanical driver is operable to cause the mirror to rotationally oscillate about first and second non- collinear axes at different first and second frequencies.
申请公布号
WO2009094165(A1)
申请公布日期
2009.07.30
申请号
WO2009US00413
申请日期
2009.01.22
申请人
ALCATEL-LUCENT USA INC.;CHEN, GANG;RYF, ROLAND;SIMON, MARIA, ELINA
