CLEANING APPARATUS AND CLEANING METHOD,申请号KR20070085983-传众专利搜索

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发明名称	CLEANING APPARATUS AND CLEANING METHOD
摘要
申请公布号	KR100910070(B1)	申请公布日期	2009.07.30
申请号	KR20070085983	申请日期	2007.08.27
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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