发明名称 |
ULTRASONIC TREATMENT APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic treatment apparatus with a simple structure that can adjust the ultrasonic outputs of a central section and a wall side in a treatment vessel and adjusts the ultrasonic outputs by ultrasonic vibrator to equalize a sound pressure distribution. SOLUTION: The ultrasonic washing apparatus that washes a washed object in a process liquid 2 by disposing the ultrasonic vibrator 3 that can input the ultrasonic output from the ultrasonic generator at a heat radiation board 12 on the bottom of the vessel 10 in which the liquid 2 is filled from an installation surface 12b of the outside bottom to excite the same vibrator, setting the surface 12b composed of the central section A at a center and wall side B thereabout at the board 12 in the vessel 10, and separately including the ultrasonic vibrator 3A that inputs a low ultrasonic output in the central section A from the ultrasonic generator and the ultrasonic vibrator 3B that inputs a high ultrasonic output in the wall side B to excite the same wall side according to the washing conditions of the vessel 10 inside the board 12b, is provided. COPYRIGHT: (C)2009,JPO&INPIT
|
申请公布号 |
JP2009166028(A) |
申请公布日期 |
2009.07.30 |
申请号 |
JP20080282226 |
申请日期 |
2008.10.31 |
申请人 |
SHIMADA PHYS & CHEM IND CO LTD |
发明人 |
TSUJI HIROKI;ANDO HIDEKAZU |
分类号 |
B08B3/12;B06B1/06;H01L21/304 |
主分类号 |
B08B3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|